An important area of research and innovation is the development of Smart Microsystems in various fields ranging from biomedical to automotive, to communications, environment, gaming, space applications. To develop this field of research, the project entailed the setting up of MEMS (Micro-Electrical-Mechanical Systems) Characterisation Facilities at the University of Malta for the testing and characterisation of MEMS devices and Smart Microsystems, for both single devices as well as packaged devices.